VT6200 Series Long-Travel Confocal Microscope
The VT6000 series confocal microscope is a detection instrument used for micrometer and nanometer-level measurement of the surface of various precision components and materials. It uses confocal technology, combined with a precise Z-axis scanning module and 3D modeling algorithm, to perform non-contact scanning of the device surface and establish a 3D surface image. The system software processes and analyzes the 3D image of the device surface and obtains 2D and 3D parameters reflecting the surface quality of the device, thereby achieving optical detection of the 3D measurement of the device surface morphology. It can measure various surfaces, from smooth to rough, low reflectivity to high reflectivity, and the roughness, flatness, microscopic geometry profile, and curvature of workpieces from the nanometer to the micrometer level, providing more than 300 2D and 3D parameters based on four domestic and international standards, including ISO/ASME/EUR/GBT, as evaluation standards.
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Microscope
Electronics and Electrical Engineering
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- Product Description
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- Commodity name: VT6200 Series Long-Travel Confocal Microscope
The VT6000 series confocal microscope is a detection instrument used for micrometer and nanometer-level measurement of the surface of various precision components and materials. It uses confocal technology, combined with a precise Z-axis scanning module and 3D modeling algorithm, to perform non-contact scanning of the device surface and establish a 3D surface image. The system software processes and analyzes the 3D image of the device surface and obtains 2D and 3D parameters reflecting the surface quality of the device, thereby achieving optical detection of the 3D measurement of the device surface morphology. It can measure various surfaces, from smooth to rough, low reflectivity to high reflectivity, and the roughness, flatness, microscopic geometry profile, and curvature of workpieces from the nanometer to the micrometer level, providing more than 300 2D and 3D parameters based on four domestic and international standards, including ISO/ASME/EUR/GBT, as evaluation standards.
The VT6000 series confocal microscope is a detection instrument used for micrometer and nanometer-level measurement of various precision components and material surfaces. It uses confocal technology, combined with a precision Z-axis scanning module and 3D modeling algorithms, to perform non-contact scanning of the device surface and establish a 3D surface image. The system software processes and analyzes the 3D image of the device surface, obtains 2D and 3D parameters that reflect the surface quality of the device, and thus achieves optical detection of the 3D measurement of the device surface morphology. It can measure various object surfaces, from smooth to rough, low reflectivity to high reflectivity, and roughness, flatness, micro-geometric profile, curvature, etc., of workpieces from the nanometer to micrometer level, providing more than 300 2D and 3D parameters based on four domestic and international standards, ISO/ASME/EUR/GBT, as evaluation standards.
Can detect samples with steep angles
Not limited by the reflectivity of the sample surface
One-click analysis of batch samples
Supports more than 300 2D and 3D parameter standards
Performance Characteristics
1. High precision, high repeatability
1) Based on a rotating disk confocal optical system, combined with a high-stability structural design and excellent 3D reconstruction algorithm, it forms a measurement system to ensure the high measurement accuracy of the instrument.
2) The unique shockproof design can reduce vibration noise from the bottom, and the instrument is stable and reliable in most environments, with good measurement repeatability.2. Integrated measurement and analysis software
1) Measurement and analysis are operated on the same interface without switching. Measurement data is automatically collected, realizing the function of fast batch measurement.
2) Visual window for users to observe the scanning process in real time.
3) Automated measurement function combined with a custom analysis template can automatically complete the measurement and analysis process for multiple areas.
4) Five functional modules are complete: geometric analysis, roughness analysis, structural analysis, frequency analysis, and functional analysis.
5) One-click analysis, multi-file analysis, and freely combining analysis items are saved as analysis templates. Batch samples can be analyzed with one click, and data analysis and statistical charts are provided.
6) It can measure more than 300 2D and 3D parameters based on standards such as ISO/ASME/EUR/GBT.3. Precision control handle
The integrated control handle with X, Y, and Z directional displacement adjustment functions allows for quick completion of pre-measurement tasks such as stage translation and Z-axis focusing.4. Double collision protection measures
In addition to software ZSTOP setting Z-axis displacement lower limit for collision protection, a mechanical and electronic sensor is designed on the Z-axis. When the lens touches the sample surface, the instrument automatically enters the emergency stop state, maximizing the protection of the instrument and reducing the risk of human operation.
Application Areas
Technical Specifications
Instrument Model VT6100 VT6200 VT6300 Travel Range X 100mm 230mm 300mm Y 100mm 230mm 300mm Z 100mm 100mm 100mm Dimensions 520×380×600mm 720×580×1500mm 1000×900×1500mm Instrument Weight 50kg 400kg 500kg Measurement Principle Confocal Optical System Microscope Objective 10×, 20×, 50×, 100× Field of View 120×120 μm~1.2×1.2 mm Height Measurement Repeatability*1 (1σ) 12nm Accuracy*1 ± (0.2+L/100) μm Display Resolution 0.5nm Width Measurement Repeatability*2 (1σ) 40nm Accuracy*2 ± 2% Display Resolution 1nm XY Displacement Platform Load 10kg Control Method Electric Z0 Axis Scanning Range 10 mm Objective Turret 5-hole electric Light Source White LED Operating Environment
Power Supply 100-240V AC, 50/60Hz, 2A, Power 300W Operating Temperature Temperature 15℃~30℃, Temperature Gradient < 2℃/60 minutes Relative Humidity 5%~95%RH, non-condensing Environmental Vibration VC-C or better Other No strong magnetic field, no corrosive gases *1 Using a 50X objective lens to measure a 4.7µm standard step block in a laboratory environment
*2 Using a 50X objective lens to measure a standard line grating in a laboratory environment
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