SuperView W1 Optical 3D Surface Profiler
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Electronics and Electrical Engineering
Dimension measurement
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隐藏域元素占位
- Product Description
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- Commodity name: SuperView W1 Optical 3D Surface Profiler
Specialized functions in the semiconductor field
● Simultaneously supports measurements of 6, 8, and 12-inch wafers, and can automatically switch between three sizes of vacuum chucks with one click to adapt to different wafer sizes
● It has the function of automatically measuring the roughness of thinned wafers after grinding, and can measure the roughness of dozens of small areas with one click to obtain the average value
● It has the function of measuring the depth and width profile data of the grooves after laser scribing in the dicing process, and can realize the data measurement and analysis of the surface and multiple profile lines related to the groove depth and width with one click
● It has the function of measuring the film step height in the wafer manufacturing process, covering a measurement range from 1nm to 1mm, and achieving high-precision measurement
Technical Indicators
Instrument Model superview W3 Instrument Dimensions 1000 X 900 X 1500 Instrument Host Weight < 500 kg Light Source White light LED Imaging System 1024 X 1024 Interference Objective 10x,(2.5x,5x, 20x,50x,100x) Optical ZOOM 0.5X , (0.75X , 1X , 0.375X) Standard Field of View 0.98 x 0.98mm Objective Turret 5-hole electric XY Stage Dimensions 450 x 450mm Travel Range 300 x 300mm Load 10kg Control Method Electric Horizontal Adjustment ±6", Electric Z-axis Focus Travel 100mm Electric Control Method Z-axis Scanning Range 10mm Morphology Repeatability 0.1nm Roughness RMS Repeatability 0.005nm Step Accuracy 0.3% Measurement Repeatability 0.08% 1o Environmental Requirements 1 Operating environment: no strong magnetic field, no corrosive gases 4 Environmental vibration: VC-C or better 2 Operating temperature: 15°C-30°C,
Temperature gradient < 2°C/60 minutes5 Vibration isolation air source: 0.8Mpa stable and clean air source, oil and water removal, air tube diameter 6mm
(Optional)3 Relative humidity: 5%-95%RH, no condensation 6 Power supply: 330W Other Requirements 1 The light source should not be kept at high brightness for a long time 2 Do not shake the instrument platform directly with your hands during measurement
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